TY - CONF T1 - A micro-manipulator vision in IC Manufacturing T2 - Proceedings. 1988 IEEE International Conference on Robotics and Automation Y1 - 1988 A1 - Ram Dantu A1 - Dimopoulos, Nikitas A1 - Patel, Rajni A1 - Al-Khalili, Asim KW - Automatic testing KW - Circuit testing KW - computer vision KW - computer vision module KW - computerised pattern recognition KW - expert system KW - expert systems KW - IC Manufacturing KW - image processing KW - industrial robots KW - Inspection KW - integrated circuit manufacture KW - integrated circuit testing KW - Machine vision KW - Manufacturing KW - micromanipulator vision KW - Micromanipulators KW - Probes KW - robots KW - Semiconductivity KW - Semiconductor device manufacture KW - Semiconductor device testing KW - System testing KW - test pads KW - VLSI KW - wafer testing AB -

An overview is presented of a micromanipulator vision system for use in automating various functions during the testing of a wafer for semiconducting parameters and inspection of VLSI circuits. Positioning the probe and touching a test pad are the chief concern of the work desired. A brief description of the experimental setup is given. The image processing techniques used in identifying and controlling the location of various components such as the probes and the test pads are discussed. The vision modules and an expert system using hierarchical plan generation to control the sequence of plans are included

JF - Proceedings. 1988 IEEE International Conference on Robotics and Automation ER -