01095nas a2200133   4500008004100000245004500041210004500086520071500131100001500846700001700861700002400878700002100902856003800923       1990                        eng d00aVision Algorithms For VLSI Wafer Probing0 aVision Algorithms For VLSI Wafer Probing3 a<p>This paper deals with an important problem encountered in automating VLSI wafer probing. In this automation, vision is used for accurately guiding and lowering a probe to make contact with the wafer. In this paper, we discuss various algorithms used in measurement of the distance of the micro-manipulator from the wafer surface. In particular, we describe algorithms for alignment of consecutive frames of the wafer, separation of probe and wafer regions, and getting a clean image of the probe by eliminating traces of the background patterns. We also describe a three-level procedure for obtaining the proximity of the probe from the wafer. These algorithms are verified with the experimental data.</p>
1 aDantu, Ram1 aPatel, Rajni1 aDimopoulos, Nikitas1 aAl-Khalili, Asim  uhttps://doi.org/10.1117/12.969934